@article{oai:oist.repo.nii.ac.jp:00001850, author = {Qiu, Longbin and He, Sisi and Liu, Zonghao and Ono, Luis K. and Son, Dae-Yong and Liu, Yuqiang and Tong, Guoqing and Qi, Yabing}, issue = {44}, journal = {Journal of Materials Chemistry A}, month = {Oct}, note = {Hybrid chemical vapor deposition (HCVD) has been employed in fabrication of perovskite solar cells (PSCs) and modules (PSMs), which shows promise in upscalable fabrication. However, the conventional HCVD process usually requires a relatively long processing time (e.g., several hours) and the PSCs often exhibit a salient hysteresis behavior, which impedes this technology to mass production. Herein, we demonstrate a rapid HCVD (RHCVD) fabrication process of PSCs using a rapid thermal process, which not only significantly reduces the deposition time to <10 min but also effectively suppresses hysteresis. This markedly reduced deposition time is comparable to solution coating processes. Furthermore, the shorter processing time inside the furnace reduces the exposure time of the glass/ITO/SnO2 substrates in vacuum, which helps maintain the high quality of SnO2 electron-transport layer resulting in a lower density of gap states. Finally, 22.4 cm2 PSMs fabricated by RHCVD achieved an efficiency of 12.3%, and maintained 90% of the initial value after operation under continuous light illumination for over 800 h.}, pages = {23404--23412}, title = {Rapid hybrid chemical vapor deposition for efficient and hysteresis-free perovskite solar modules with an operation lifetime exceeding 800 hours}, volume = {8}, year = {2020} }