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  1. 学術雑誌論文
  2. フリードユニット

Early stages of polycrystalline diamond deposition: laser reflectance at substrates with growing nanodiamonds

https://oist.repo.nii.ac.jp/records/2893
https://oist.repo.nii.ac.jp/records/2893
f957e415-9cda-44bb-9afc-54761227d121
名前 / ファイル ライセンス アクション
d2na00723a.pdf d2na00723a (3.7 MB)
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Item type 学術雑誌論文 / Journal Article(1)
公開日 2023-01-24
タイトル
言語 en
タイトル Early stages of polycrystalline diamond deposition: laser reflectance at substrates with growing nanodiamonds
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
著者(英) Vázquez-Cortés, David

× Vázquez-Cortés, David

WEKO 18389

Vázquez-Cortés, David

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Janssens, Stoffel D.

× Janssens, Stoffel D.

WEKO 18390

Janssens, Stoffel D.

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Sutisna, Burhannudin

× Sutisna, Burhannudin

WEKO 18391

Sutisna, Burhannudin

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Fried, Eliot

× Fried, Eliot

WEKO 18392

Fried, Eliot

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書誌情報 en : Nanoscale Advances

巻 5, 号 2, p. 412-424, 発行日 2022-12-01
抄録
内容記述タイプ Other
内容記述 The chemical vapor deposition of polycrystalline diamond (PCD) films is typically done on substrates seeded with diamond nanoparticles. Specular laser reflectance has been used in tandem with a continuous film model to monitor the thickness of these films during their deposition. However, approaches to gain information on properties that strongly affect film morphology, such as the areal density of seeds, remain largely unexplored. This work outlines a strategy for using laser reflectance measurements to refine the monitoring of film thickness during deposition, estimate the mean equivalent radii and the areal density of seeds, and estimate growth incubation periods. We present a general model based on the Rayleigh theory of scattering for laser reflectance at substrates with growing nanoparticles that captures the early stages of PCD deposition. We test our model experimentally by depositing diamond under identical conditions on silicon substrates with various seed densities and by comparing seed densities obtained by scanning electron microscopy to those determined by our strategy. We also explore the different deposition stages for which our model and a continuous film model can be used safely. In addition to providing guidelines for characterizing PCD deposition, this work may also advance the general understanding of nanoparticle growth and formation.
出版者
出版者 Royal Society of Chemistry
ISSN
収録物識別子タイプ ISSN
収録物識別子 2516-0230
DOI
関連タイプ isIdenticalTo
識別子タイプ DOI
関連識別子 info:doi/10.1039/D2NA00723A
権利
権利情報 © 2023 The Authors.
関連サイト
識別子タイプ URI
関連識別子 https://pubs.rsc.org/en/content/articlelanding/2023/NA/D2NA00723A
著者版フラグ
出版タイプ VoR
出版タイプResource http://purl.org/coar/version/c_970fb48d4fbd8a85
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